Airpel Cylinder

MAKER : Airpel
MODEL : E16D 1.0N
Q'ty : 6ea
Condition : NEW

CS-AM005P

Tool Model : Mirra

Company : AMAT

Material : PEEK + SS
Dimension

Outer Dia. : 248 mm

Inner Dia. : 200.5 mm

Thickness : 17 mm

TTV : ± 5/1000 mm

CS-SI005P

Tool Model : Auriga*

Company : SpeedFam-IPEC

Material : PEEK + SS

Dimension

Outer Dia. : 224.8 mm

Inner Dia. : 202 mm

Thickness : 22.7 mm

TTV : ± 5/1000 mm

CS-AM017P

Retainer Ring, PEEK STD.

For Mirra, AMAT.

CS-SI013P

Tool Model : AVANTI 472
Company : SpeedFam-IPEC
Material : PEEK
Dimension
Outer Dia. : 225 mm
Inner Dia. : 201 mm
Thickness : 13.2 mm
TTV : ± 5/1000 mm

CS-SI009B

Tool Model : Avantigaard 776
Company : SpeedFam-IPEC
Material : PBT
Dimension
Outer Dia. : 305 mm
Inner Dia. : 200.7 mm
Thickness : 9.5 mm
TTV : ± 5/1000 mm

PVA Brush

PVA Brushes are used to clean wafers in the cleaning station on CMP Tools

We are developing Brushes with a Japanese Company and with a local company at a same time

Other parts

We are manufactuing any parts made of Teflon, Engineering PlasticsWe greatly welcome to develop any parts with new design or material under JDP condition or customers’ requests