Airpel Cylinder
MAKER : Airpel
MODEL : E16D 1.0N
Q'ty : 6ea
Condition : NEW
CS-AM005P
Tool Model : Mirra
Company : AMAT
Material : PEEK + SS
Dimension
Outer Dia. : 248 mm
Inner Dia. : 200.5 mm
Thickness : 17 mm
TTV : ¡¾ 5/1000 mm
CS-SI005P
Tool Model : Auriga*
Company : SpeedFam-IPEC
Material : PEEK + SS
Dimension
Outer Dia. : 224.8 mm
Inner Dia. : 202 mm
Thickness : 22.7 mm
TTV : ¡¾ 5/1000 mm
CS-AM017P
Retainer Ring, PEEK STD.
For Mirra, AMAT.
CS-SI013P
Tool Model : AVANTI 472
Company : SpeedFam-IPEC
Material : PEEK
Dimension
Outer Dia. : 225 mm
Inner Dia. : 201 mm
Thickness : 13.2 mm
TTV : ¡¾ 5/1000 mm
CS-SI009B
Tool Model : Avantigaard 776
Company : SpeedFam-IPEC
Material : PBT
Dimension
Outer Dia. : 305 mm
Inner Dia. : 200.7 mm
Thickness : 9.5 mm
TTV : ¡¾ 5/1000 mm
PVA Brush
PVA Brushes are used to clean wafers in the cleaning station on CMP Tools
We are developing Brushes with a Japanese Company and with a local company at a same time
Other parts
We are manufactuing any parts made of Teflon, Engineering PlasticsWe greatly welcome to develop any parts with new design or material under JDP condition or customers¡¯ requests