CS-AM005P

Tool Model : Mirra

Company : AMAT

Material : PEEK + SS

Dimension

Outer Dia. : 248 mm

Inner Dia. : 200.5 mm

Thickness : 17 mm

TTV : ¡¾ 5/1000 mm

CS-SI005P

Tool Model : Auriga*

Company : SpeedFam-IPEC

Material : PEEK + SS

Dimension

Outer Dia. : 224.8 mm

Inner Dia. : 202 mm

Thickness : 22.7 mm

TTV : ¡¾ 5/1000 mm
 

CS-AM017P

Retainer Ring, PEEK STD.

For Mirra, AMAT.
 

CS-SI013P

Tool Model : AVANTI 472
Company : SpeedFam-IPEC
Material : PEEK
Dimension
Outer Dia. : 225 mm
Inner Dia. : 201 mm
Thickness : 13.2 mm
TTV : ¡¾ 5/1000 mm
 

CS-SI009B

Tool Model : Avantigaard 776
Company : SpeedFam-IPEC
Material : PBT
Dimension
Outer Dia. : 305 mm
Inner Dia. : 200.7 mm
Thickness : 9.5 mm
TTV : ¡¾ 5/1000 mm
 

PVA Brush

PVA Brushes are used to clean wafers in the cleaning station on CMP Tools

We are developing Brushes with a Japanese Company and with a local company at a same time

 

Other parts

We are manufactuing any parts made of Teflon, Engineering PlasticsWe greatly welcome to develop any parts with new design or material under JDP condition or customers¡¯ requests