|
|
CS-AM005P
|
|
Tool Model : Mirra
Company : AMAT
Material : PEEK + SS
Dimension
Outer Dia. : 248 mm
Inner Dia. : 200.5 mm
Thickness : 17 mm
TTV : ¡¾ 5/1000 mm
|
|
|
|
|
|
CS-SI005P
|
|
Tool Model : Auriga*
Company : SpeedFam-IPEC
Material : PEEK + SS
Dimension
Outer Dia. : 224.8 mm
Inner Dia. : 202 mm
Thickness : 22.7 mm
TTV : ¡¾ 5/1000 mm
|
|
|
|
|
|
CS-AM017P
|
|
Retainer Ring, PEEK
STD.
For Mirra, AMAT.
|
|
|
|
|
CS-SI013P
|
|
Tool Model : AVANTI
472
Company : SpeedFam-IPEC
Material : PEEK
Dimension
Outer Dia. : 225 mm
Inner Dia. : 201 mm
Thickness : 13.2 mm
TTV : ¡¾ 5/1000 mm
|
|
|
|
|
CS-SI009B
|
|
Tool Model : Avantigaard
776
Company : SpeedFam-IPEC
Material : PBT
Dimension
Outer Dia. : 305 mm
Inner Dia. : 200.7 mm
Thickness : 9.5 mm
TTV : ¡¾ 5/1000 mm
|
|
|
|
|
PVA Brush
|
|
PVA Brushes are
used to clean wafers in the cleaning
station on CMP Tools
We are developing Brushes with
a Japanese Company and with a local
company at a same time
|
|
|
|
|
|
Other parts
|
We are manufactuing any parts made
of Teflon, Engineering PlasticsWe
greatly welcome to develop any parts
with new design or material under
JDP condition or customers¡¯ requests
|
|
|
|
|
|